Case Number: App_475272/2023 Patent number: EP3076424 - SELECTIVELY REMOVING TITANIUM NITRIDE HARD MASK AND ETCH RESIDUE REMOVALProceeding type: ApplicationAction/Application: Opt-outApplicants: Clarivate Represented by Iva MatkovicCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-02 19:52:30