Case Number: App_475243/2023 Patent number: EP2857552 - Methods for depositing silicon nitride filmsProceeding type: ApplicationAction/Application: Inanspruchnahme der AusnahmeregelungApplicants: Clarivate Represented by Iva MatkovicCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-02 19:50:40