Case Number: App_475291/2023 Patent number: EP3196336 - HIGH TEMPERATURE ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMSProceeding type: ApplicationAction/Application: Inanspruchnahme der AusnahmeregelungApplicants: Clarivate Represented by Iva MatkovicCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-02 19:53:45