Case Number: App_475320/2023 Patent number: EP3447109 - ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON OVER SILICON-GERMANIUM ALLOY FROM A SILICON-GERMANIUM/ SILICON STACK DURING MANUFACTURE OF A SEMICONDUCTOR DEVICEProceeding type: ApplicationAction/Application: Inanspruchnahme der AusnahmeregelungApplicants: Clarivate Represented by Iva MatkovicCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-02 19:55:32