Case Number: App_465609/2023 Patent number: EP4114999 - SYSTEM AND METHOD FOR MONITORING SEMICONDUCTOR PROCESSESProceeding type: ApplicationAction/Application: DérogationApplicants: Hauck Patentanwaltspartnerschaft mbB Represented by Thomas KregelinCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-01 18:24:58