Case Number: App_475287/2023 Patent number: EP3347504 - METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRIDE FILM AND RESULTANT FILMSProceeding type: ApplicationAction/Application: DérogationApplicants: Clarivate Represented by Iva MatkovicCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-02 19:53:30