Case Number: App_475288/2023 Patent number: EP3359705 - METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRIDE FILMProceeding type: ApplicationAction/Application: DérogationApplicants: Clarivate Represented by Iva MatkovicCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-02 19:53:33